Aberration model of a multi beam scanning microscope for electron beam-induced deposition

van Bruggen, MJ; van Someren, B; Kruit, P.

Aberration model of a multi beam scanning microscope for electron beam-induced deposition

Journal article (2006)

Authors

MJ van Bruggen ImPhys/Charged Particle Optics

B van Someren ImPhys/Charged Particle Optics

P. Kruit ImPhys/Charged Particle Optics

Research Group

ImPhys/Charged Particle Optics

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Published Date

2006

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Research Group

ImPhys/Charged Particle Optics