Influence of visco-elasticity of low-k dielectrics on thermo-mechanical behavior of dual damascene process

Conference paper (2003)

Authors

V Gonda Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
GQ Zhang External organisation
Jaap Den Toonder External organisation
J Beijer External organisation
L.J. Ernst Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2003

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems