Polymide sacrificial layer for an all-dry post-process surface micromachining module

Pham, HTM; Bagolini, A; de Boer, C.R.; Laros, J.M.W.; Pakula, L.S.; French, P.J.; Sarro, Pasqualina M

Polymide sacrificial layer for an all-dry post-process surface micromachining module

Conference paper (2003)

Authors

HTM Pham Electronic Components, Technology and Materials -

A Bagolini Electronic Components, Technology and Materials -

C.R. de Boer Electronic Components, Technology and Materials -

J.M.W. Laros Electronic Components, Technology and Materials -

L.S. Pakula Electronic Instrumentation -

P.J. French Electronic Instrumentation -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2003

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials