Resolution enhancement in extreme ultraviolet lithography: the imaging of a 2-D reflecting phase shifting mask with conical illumination.

Conference paper (2006)

Authors

A.M. Nugrowati ImPhys/Optics
A.S. van de Nes ImPhys/Optics
Silvania Pereira ImPhys/Optics
JJM Braat ImPhys/Optics
Research Group
ImPhys/Optics
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Published Date

2006

Language

Undefined/Unknown

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Research Group

ImPhys/Optics

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