High-frequency gas effusion through nanopores in suspended graphene

Journal article (2020)

Authors

I.E. Roslon Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , Kavli institute of nanoscience Delft
R.J. Dolleman Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS , Rheinisch-Westfälische Technische Hochschule
P.G. Steeneken Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS , Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
H. Licona Student, Kavli institute of nanoscience Delft
M. Lee Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS
M. Siskins Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS
H. Lebius ENSICAEN Ecole Nationale Superieure d'Ingenieurs de Caen
L. Madauß Universität Duisburg-Essen
M. Schleberger Universität Duisburg-Essen
F. Alijani Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
H.S.J. van der Zant Kavli institute of nanoscience Delft, QN/van der Zant Lab - AS
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2020 I.E. Roslon, R.J. Dolleman, H. Licona, M. Lee, M. Siskins, H. Lebius, L. Madauß, M. Schleberger, F. Alijani, H.S.J. van der Zant, P.G. Steeneken
DOI: https://doi.org/10.1038/s41467-020-19893-5
More Info
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Published Date

2020

Language

English

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems

Abstract

Porous, atomically thin graphene membranes have interesting properties for filtration and sieving applications. Here, graphene membranes are used to pump gases through nanopores using optothermal forces, enabling the study of gas flow through nanopores at frequencies above 100 kHz. At these frequencies, the motion of graphene is closely linked to the dynamic gas flow through the nanopore and can thus be used to study gas permeation at the nanoscale. By monitoring the time delay between the actuation force and the membrane mechanical motion, the permeation time-constants of various gases through pores with diameters from 10–400 nm are shown to be significantly different. Thus, a method is presented for differentiating gases based on their molecular mass and for studying gas flow mechanisms. The presented microscopic effusion-based gas sensing methodology provides a nanomechanical alternative for large-scale mass-spectrometry and optical spectrometry based gas characterisation methods.