On the effects of implantation temperature in helium implanted silicon

Journal article (2002)

Authors

E Oliviero External organisation
ML David External organisation
MF Beaufort External organisation
JF Barbot External organisation
A van Veen Old - Section Defects in Materials
Research Group
Old - Section Defects in Materials
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Published Date

2002

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials

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