Photoresist coating methods for the integration of novel 3-D RF microstructures

Pham, NP; Boellaard, E; Burghartz, JN; Sarro, Pasqualina M.

Photoresist coating methods for the integration of novel 3-D RF microstructures

Journal article (2004)

Authors

NP Pham Electronic Components, Technology and Materials

E Boellaard Electronic Components, Technology and Materials

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

Pasqualina M. Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

ZX CWTS JFIS >= 3.00

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Published Date

2004

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Research Group

Electronic Components, Technology and Materials