Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate

Yan, B; Pham, HTM; Ma, Y.; Zhuang, Y; Sarro, Pasqualina M

Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate

Journal article (2007)

Authors

B Yan Electronic Components, Technology and Materials -

HTM Pham Electronic Components, Technology and Materials -

Y. Ma External organisation

Y Zhuang Old - EWI Ch. Integrated Sensing Devices

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials