Rapid Fabrication of High-Performance Flexible Pressure Sensors Using Laser Pyrolysis Direct Writing

Journal article (2023)

Authors

S. Wang Southern University of Science and Technology, Bio-Electronics - EEMCS
Qihang Zong Southern University of Science and Technology
Huiru Yang Southern University of Science and Technology
C. Tan Southern University of Science and Technology, Electronic Components, Technology and Materials - EEMCS
Qianming Huang Southern University of Science and Technology
X. Liu Southern University of Science and Technology, Electronic Components, Technology and Materials - EEMCS
Kouchi Zhang Electronic Components, Technology and Materials - EEMCS
P.J. French Bio-Electronics - EEMCS
H. Ye Southern University of Science and Technology, Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2023 S. Wang, Qihang Zong, Huiru Yang, C. Tan, Qianming Huang, X. Liu, Kouchi Zhang, P.J. French, H. Ye
DOI: https://doi.org/10.1021/acsami.3c04290
More Info
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Published Date

2023

Language

English

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

The fabrication of flexible pressure sensors with low cost, high scalability, and easy fabrication is an essential driving force in developing flexible electronics, especially for high-performance sensors that require precise surface microstructures. However, optimizing complex fabrication processes and expensive microfabrication methods remains a significant challenge. In this study, we introduce a laser pyrolysis direct writing technology that enables rapid and efficient fabrication of high-performance flexible pressure sensors with a micro-truncated pyramid array. The pressure sensor demonstrates exceptional sensitivities, with the values of 3132.0, 322.5, and 27.8 kPa-1 in the pressure ranges of 0-0.5, 0.5-3.5, and 3.5-10 kPa, respectively. Furthermore, the sensor exhibits rapid response times (loading: 22 ms, unloading: 18 ms) and exceptional reliability, enduring over 3000 pressure loading and unloading cycles. Moreover, the pressure sensor can be easily integrated into a sensor array for spatial pressure distribution detection. The laser pyrolysis direct writing technology introduced in this study presents a highly efficient and promising approach to designing and fabricating high-performance flexible pressure sensors utilizing micro-structured polymer substrates.