Direct spray coating of photoresist - a new method for patterning 3-D structures

Pham, PN; Scholtes, T.L.M.; Klerks, R.; Boellaard, E; Sarro, PM; Burghartz, JN

Direct spray coating of photoresist - a new method for patterning 3-D structures

Conference paper (2002)

Authors

PN Pham Electronic Components, Technology and Materials

T.L.M. Scholtes Electronic Components, Technology and Materials

R. Klerks Electronic Components, Technology and Materials

E Boellaard Electronic Components, Technology and Materials

PM Sarro Electronic Components, Technology and Materials

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

Research Group

Electronic Components, Technology and Materials

Elektrotechniek Techniek

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Published Date

2002

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Research Group

Electronic Components, Technology and Materials

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