Direct spray coating of photoresist - a new method for patterning 3-D structures

Pham, PN; Scholtes, T.L.M.; Klerks, R.; Boellaard, E; Sarro, Pasqualina M; Burghartz, JN

Direct spray coating of photoresist - a new method for patterning 3-D structures

Conference paper (2002)

Authors

PN Pham Electronic Components, Technology and Materials -

T.L.M. Scholtes Electronic Components, Technology and Materials -

R. Klerks Electronic Components, Technology and Materials -

E Boellaard Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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Published Date

2002

Language

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials