Atoms show the future for lithography.

Journal article (1999)

Authors

LJ Geerligs QN/Fysics of NanoElectronics
S Radelaar OLD Metals Processing, Microstructures and Properties
G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties
Research Group
QN/Fysics of NanoElectronics
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Published Date

1999

Language

Undefined/Unknown

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Research Group

QN/Fysics of NanoElectronics