Substrate options and add-on process modules for monolithic RF silicon technology

Burghartz, JN; Bartek, M.; Rejaei, B; Sarro, Pasqualina Maria; Poliakov, A; Pham, NP; Boellaard, E; Ng, TK

Substrate options and add-on process modules for monolithic RF silicon technology

Conference paper (2002)

Authors

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

M. Bartek Old - EWI Ch. Integrated Sensing Devices

B Rejaei QN/Theoretical Physics

Pasqualina Maria Sarro Electronic Components, Technology and Materials

A Poliakov Old - EWI Ch. Integrated Sensing Devices

NP Pham Electronic Components, Technology and Materials

E Boellaard Electronic Components, Technology and Materials

TK Ng Old - EWI Ch. Integrated Sensing Devices

Research Group

Old - EWI Ch. Integrated Sensing Devices

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Published Date

2002

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Research Group

Old - EWI Ch. Integrated Sensing Devices