Ultrathin Piezoelectric Resonators Based on Graphene and Free-Standing Single-Crystal BaTiO3

Journal article (2022)

Authors

M. Lee Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS
Johannes R. Renshof Kavli institute of nanoscience Delft, Student
A. Caviglia Kavli institute of nanoscience Delft, QN/Caviglia Lab - AS
H.S.J. van der Zant QN/van der Zant Lab - AS , Kavli institute of nanoscience Delft
P.G. Steeneken Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , QN/Steeneken Lab - AS , Kavli institute of nanoscience Delft
K.J. van Zeggeren ImPhys/Practicum support , Kavli institute of nanoscience Delft
M.J.A. Houmes Kavli institute of nanoscience Delft, QN/van der Zant Lab - AS
E.L. Lesne Kavli institute of nanoscience Delft, QN/Steele Lab - AS
M. Siskins Kavli institute of nanoscience Delft
T.C. van Thiel QN/Groeblacher Lab - AS , QN/Caviglia Lab - AS , Kavli institute of nanoscience Delft
R.H. Guis Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
M.R. van Blankenstein QRD/Wimmer Group - QuTech Advanced Research Centre , Kavli institute of nanoscience Delft
G.J. Verbiest Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
QN/van der Zant Lab (AS) (TU Delft)
Copyright: © 2022 M. Lee, Johannes R. Renshof, K.J. van Zeggeren, M.J.A. Houmes, E.L. Lesne, M. Siskins, T.C. van Thiel, R.H. Guis, M.R. van Blankenstein, G.J. Verbiest, A. Caviglia, H.S.J. van der Zant, P.G. Steeneken
DOI: https://doi.org/10.1002/adma.202204630
More Info
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Published Date

2022

Language

English

Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/van der Zant Lab

Abstract

Suspended piezoelectric thin films are key elements enabling high-frequency filtering in telecommunication devices. To meet the requirements of next-generation electronics, it is essential to reduce device thickness for reaching higher resonance frequencies. Here, the high-quality mechanical and electrical properties of graphene electrodes are combined with the strong piezoelectric performance of the free-standing complex oxide, BaTiO3 (BTO), to create ultrathin piezoelectric resonators. It is demonstrated that the device can be brought into mechanical resonance by piezoelectric actuation. By sweeping the DC bias voltage on the top graphene electrode, the BTO membrane is switched between the two poled ferroelectric states. Remarkably, ferroelectric hysteresis is also observed in the resonance frequency, magnitude and Q-factor of the first membrane mode. In the bulk acoustic mode, the device vibrates at 233 GHz. This work demonstrates the potential of combining van der Waals materials with complex oxides for next-generation electronics, which not only opens up opportunities for increasing filter frequencies, but also enables reconfiguration by poling, via ferroelectric memory effect.