Non-linear bulk micromachined accelerometer for high sensitivity applications

Conference paper (2018)

Authors

L.M. Middelburg Electronic Components, Technology and Materials - EEMCS
B. el Mansouri Electronic Components, Technology and Materials - EEMCS
René H. Poelma Electronic Components, Technology and Materials - EEMCS
Kouchi Zhang Electronic Components, Technology and Materials - EEMCS
H.W. van Zeijl Electronic Components, Technology and Materials - EEMCS
J. Wei EKL Processing - EEMCS , Else Kooi Laboratory
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2018 L.M. Middelburg, B. el Mansouri, René H. Poelma, Kouchi Zhang, H.W. van Zeijl, J. Wei
DOI: https://doi.org/10.1109/ICSENS.2018.8589630
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Published Date

2018

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.