Systematic positron study of hydrophilicity of the internal pore surface in ordered low-k silica thin films

Escobar Galindo, R; van Veen, A; Schut, H.; Eijt, S.W.H.; Falub, CV; Balkenende, AR; de Theije, F.K.

Systematic positron study of hydrophilicity of the internal pore surface in ordered low-k silica thin films

Journal article (2003)

Authors

R Escobar Galindo Old - Section Defects in Materials

A van Veen Old - Section Defects in Materials

H. Schut Old - Section Defects in Materials

S.W.H. Eijt Old - Section Defects in Materials

CV Falub Old - Section Defects in Materials

AR Balkenende External organisation

F.K. de Theije External organisation

Research Group

Old - Section Defects in Materials

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Published Date

2003

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Research Group

Old - Section Defects in Materials