Engineering and tuning GHz SAWs in suspended SiN membranes

Soltész, A.

Engineering and tuning GHz SAWs in suspended SiN membranes

Master thesis (2024)

Authors

A. Soltész Mechanical Engineering

Contributors

Gerard J. Verbiest Dynamics of Micro and Nano Systems (mentor)

R. A. Norte Dynamics of Micro and Nano Systems (graduation committee member)

Faculty

Mechanical Engineering, Mechanical Engineering

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Published Date

19-06-2024

Language

English

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Faculty

Mechanical Engineering

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