Laser Annealing of Self-Aligned As+ Implants in Contact Windows for Ultrashallow Junction Formation

Biasotto, C; Gonda, V; Nanver, L.K.; van der Cingel, J.; Jovanovic, V.

Laser Annealing of Self-Aligned As+ Implants in Contact Windows for Ultrashallow Junction Formation

Conference paper (2009)

Authors

C Biasotto Electronic Components, Technology and Materials

V Gonda Electronic Components, Technology and Materials

L.K. Nanver Electronic Components, Technology and Materials

J. van der Cingel Electronic Components, Technology and Materials

V. Jovanovic Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2009

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Research Group

Electronic Components, Technology and Materials

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