Electrical and optical properties of PECVD SiC thin films for surface micromachined devices

Pham, HTM; Akkaya, T; de Boer, C.R.; Visser, C.C.G.; Sarro, Pasqualina M

Electrical and optical properties of PECVD SiC thin films for surface micromachined devices

Conference paper (2002)

Authors

HTM Pham Electronic Components, Technology and Materials -

T Akkaya Electronic Components, Technology and Materials -

C.R. de Boer Electronic Components, Technology and Materials -

C.C.G. Visser Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2002

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials