Efficient Damage Sensitivity Analysis of Advanced Cu Low-k Bond Pad Structures Using Area Release Energy

van der Sluis, O; Engelen, RAB; van Driel, W. D.; van Gils, MAJ; van Silfhout, RBR

Efficient Damage Sensitivity Analysis of Advanced Cu Low-k Bond Pad Structures Using Area Release Energy

Conference paper (2006)

Authors

O van der Sluis External organisation

RAB Engelen External organisation

W. D. van Driel Dynamics of Micro and Nano Systems

MAJ van Gils External organisation

RBR van Silfhout External organisation

Research Group

Dynamics of Micro and Nano Systems

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Published Date

2006

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Research Group

Dynamics of Micro and Nano Systems

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