Efficient Damage Sensitivity Analysis of Advanced Cu Low-k Bond Pad Structures Using Area Release Energy

Conference paper (2006)

Authors

O van der Sluis External organisation
RAB Engelen External organisation
W.D. van Driel Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
MAJ van Gils External organisation
RBR van Silfhout External organisation
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2006

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems