Low-complexity full-melt laser-anneal process for fabrication of low-leakage implanted ultrashallow junctions

Journal article (2011)

Authors

C Biasotto Electronic Components, Technology and Materials -

V Gonda Old - EWI Sect. ECTM

L.K. Nanver Electronic Components, Technology and Materials -

T.L.M. Scholtes Electronic Components, Technology and Materials -

J. van der Cingel Electronic Components, Technology and Materials -

D Vidal External organisation

V. Jovanovic Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:ad16f9c1-f9a0-466b-b29c-a655e44b9d43

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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials