Polyimide sacrificial layer and novel materials for post-processing surface micromachining

Journal article (2002)

Authors

A Bagolini Electronic Components, Technology and Materials -

L.S. Pakula Electronic Instrumentation -

T.L.M. Scholtes Electronic Components, Technology and Materials -

HTM Pham Electronic Components, Technology and Materials -

P.J. French Electronic Instrumentation -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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Published Date

2002

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials