Spray coating of photoresist for pattern transfer on high topography surfaces

Pham, NP; Burghartz, JN; Sarro, P. M.

Spray coating of photoresist for pattern transfer on high topography surfaces

Journal article (2005)

Authors

NP Pham Electronic Components, Technology and Materials

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

P. M. Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2005

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Research Group

Electronic Components, Technology and Materials