Flexibility studies on ultra-thin silicon substrates

Conference paper (2005)

Authors

L Wang External organisation
M. Bartek Old - EWI Ch. Integrated Sensing Devices
A Poliakov Old - EWI Ch. Integrated Sensing Devices
Kaspar Jansen Dynamics of Micro and Nano Systems
L.J. Ernst Dynamics of Micro and Nano Systems
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Published Date

2005

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Integrated Sensing Devices