A novel method to prevent pattern rotation in anisotropic wet etch

Conference paper (2008)

Authors

C. Shen Electronic Components, Technology and Materials - EEMCS
HTM Pham Old - EWI Sect. ECTM
R. Dekker Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2008

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials