Silicon carbide reinforced vertically aligned carbon nanotube composite for harsh environment mems

Conference paper (2023)

Authors

J. Mo Electronic Components, Technology and Materials -

S. Shankar Support EKL

Kouchi Zhang Electronic Components, Technology and Materials -

S. Vollebregt Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

DOI: https://doi.org/10.1109/MEMS49605.2023.10052162

Harsh environment Thermal actuator SiC-CNT composite HAR structures

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Published Date

2023

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

Fabricating high-aspect-ratio (HAR) structures with silicon carbide (SiC) is a challenging task. This paper presents a silicon carbide (SiC) reinforced vertically aligned carbon nanotubes (VACNT) composite as a promising candidate to fabricate HAR MEMS devices for harsh environment applications. The use of a VACNT array allows the fast realization of HAR structures as a template for MEMS fabrication. The template can later be easily filled by amorphous-SiC due to the porous nature of the VACNT forest. The SiC-CNT nanocomposite has electrical properties dominated by VACNT arrays and mechanical stability dominated by the a-SiC. Based on this concept, a thermal actuator is fabricated and proven to function up to 450°C for the first time.

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- Embargo expired in 01-09-2023