Selective Reduction Laser Sintering

A New Strategy for NO2 Gas Detection Based on In2O3 Nanoparticles

Journal article (2025)

Authors

S. Wang Southern University of Science and Technology, Bio-Electronics - EEMCS
Chunjian Tan Electronic Components, Technology and Materials - EEMCS
Qihang Zong Southern University of Science and Technology
Shizhen Li Southern University of Science and Technology
Chenshan Gao Southern University of Science and Technology
Huiru Yang Southern University of Science and Technology
Qian Ming Huang Southern University of Science and Technology
PJ French Bio-Electronics - EEMCS
H. Ye Southern University of Science and Technology, Electronic Components, Technology and Materials - EEMCS
Research Group
Bio-Electronics (EEMCS) (TU Delft)
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Published Date

2025

Language

English

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Bio-Electronics

Abstract

This study introduces a novel strategy for fabricating flexible nitrogen dioxide (NO2) gas sensors based on Indium Oxide (In2O3) nanoparticles (NPs) employing selective reduction laser sintering (SRLS) technology. The SRSL technology utilizes ultraviolet (UV) laser selective reduction sintering to precisely and rapidly create oxygen vacancy (OV) defects in In2O3 NPs. These oxygen vacancies (OVs) enhance the active adsorption sites and contribute additional free electrons, significantly improving sensor performance at room temperature. The sensors demonstrate excellent response (S = 460.9 at 10 ppm), rapid response/recovery times (τresp/τreco = 27/570 s), and superior selectivity (response ratio > 400), in addition to robust resistance to light and humidity (under ppm-level NO2 gas). The sensors also exhibit a low detection limit (200 ppb), a high signal-to-noise ratio (94.8 dB), and good long-term stability (25 days). Moreover, under photo-assisted conditions, the recovery speed of the sensors is further improved. This technology not only provides an innovative strategy for the development of high-performance flexible NO2 gas sensors but also broadens the application potential of laser direct writing (LDW) technology in advanced materials and sensor fabrications.