Helium implantation in silicon: the effects of implantation temperature

Journal article (2003)

Authors

E Oliviero External organisation
ML David External organisation
AV Fedorov Old - Section Defects in Materials
A van Veen Old - Section Defects in Materials
MF Beaufort External organisation
JF Barbot External organisation
Research Group
Old - Section Defects in Materials
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Published Date

2003

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials

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