Phase retrieval applied to coherent Fourier scatterometry using the extended ptychographic iterative engine

Journal article (2019)

Authors

P. Dwivedi ImPhys/Optics - AS
T. Sakamoto External organisation
S.F. Pereira ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
Copyright: © 2019 P. Dwivedi, T. Sakamoto, S.F. Pereira
DOI: https://doi.org/10.1364/OSAC.2.001590
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Published Date

2019

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics

Abstract

We have demonstrated that the extended ptychographic iterative engine (ePIE) algorithm can be applied to retrieve the phase information of the vectorial scattered field of a subwavelength object with the amplitude of the scattered field as input. We applied this technique combined with coherent Fourier scatterometry to determine the phase of the scattered field of a subwavelength grating, illuminated by a focused laser beam.

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