Direct spray coating of photoresist for MEMS applications

Pham, PN; Scholtes, T.L.M.; Klerk, R; Wieder, B; Sarro, Pasqualina M; Burghartz, JN

Direct spray coating of photoresist for MEMS applications

Conference paper (2001)

Authors

PN Pham Electronic Components, Technology and Materials -

T.L.M. Scholtes Electronic Components, Technology and Materials -

R Klerk External organisation

B Wieder External organisation

Pasqualina M Sarro Electronic Components, Technology and Materials -

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

Research Group

Electronic Components, Technology and Materials () (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:6607e26e-21cf-4b05-a552-ee4ce63c8839

More Info

expand_more

Published Date

2001

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials