Oxygen related defects in the top silicon layer of SIMOX: the effects of the thermal treatments

Rivera, A; de Nijs, JMM; Balk, P; van Veen, A; Schut, H; Alkemade, PFA

Oxygen related defects in the top silicon layer of SIMOX: the effects of the thermal treatments

Journal article (2000)

Authors

A Rivera Old - Section Defects in Materials

JMM de Nijs External organisation

P Balk External organisation

A van Veen Old - Section Defects in Materials

H Schut Old - Section Defects in Materials

PFA Alkemade Old - sect Electronic Materials (NS/EM)

Research Group

Old - Section Defects in Materials

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Published Date

2000

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Research Group

Old - Section Defects in Materials

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