Downscaling of Al/Si-gate MOSFETs with Self-Aligned Laser Annealed Source/Drain Junctions

Biasotto, C; Jovanovic, V.; Nanver, L.K.; van der Cingel, J.

Downscaling of Al/Si-gate MOSFETs with Self-Aligned Laser Annealed Source/Drain Junctions

Conference paper (2009)

Authors

C Biasotto Electronic Components, Technology and Materials

V. Jovanovic Electronic Components, Technology and Materials

L.K. Nanver Electronic Components, Technology and Materials

J. van der Cingel Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

Elektrotechniek Techniek

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Published Date

2009

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Research Group

Electronic Components, Technology and Materials

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