Positronium for depth selective analysis of structuarally ordered porosity in mesoporous low-k silica films

van Veen, A; Escobar Galindo, R; Eijt, S. W H; Falub, CV; Schut, H.

Positronium for depth selective analysis of structuarally ordered porosity in mesoporous low-k silica films

Conference paper (2003)

Authors

A van Veen Old - Section Defects in Materials

R Escobar Galindo Old - Section Defects in Materials

S. W H Eijt Old - Section Defects in Materials

CV Falub Old - Section Defects in Materials

H. Schut Old - Section Defects in Materials

Research Group

Old - Section Defects in Materials

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Published Date

2003

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Research Group

Old - Section Defects in Materials

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