Coherent Fourier Scatterometry (Tool for improved sensitivity in semiconductor metrology)

Journal article (2012)

Authors

N. Kumar ImPhys/Optics - AS
O. El Gawhary ImPhys/Optics - AS
VG Kutchoukov ImPhys/Charged Particle Optics
S.F. Pereira ImPhys/Optics - AS
W Coene External organisation
Paul Urbach ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics