Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties

Journal article (2014)

Authors

Enrico Serra Electronic Components, Technology and Materials
M. Bonaldi External organisation
Antonio Borrielli External organisation
L Conti External organisation
G. Pandraud Electronic Components, Technology and Materials
PM Sarro Electronic Components, Technology and Materials
Research Group
Electronic Components, Technology and Materials
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Published Date

2014

Language

English

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Research Group

Electronic Components, Technology and Materials