Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties

Journal article (2014)

Authors

E. Serra Electronic Components, Technology and Materials - EEMCS
M. Bonaldi External organisation
A. Borrielli External organisation
L Conti External organisation
G. Pandraud Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials