Failure modes of wafer level thin film MEMS packages during wafer thinning

Conference paper (2010)

Authors

J.J.M. Zaal Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
W.D. van Driel Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering , Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
GQ Zhang External organisation
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2010

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics

Abstract

An increasing number of semiconductor companies have research programs related to MEMS resonators. This can be explained by the possible wide range of application areas. Many resonators operate in vacuum and sealing of the cavity can be obtained by using a Wafer Level Thin Film Package (WLTFP). To fit the MEMS-die into a small package it needs to be thinned. In this paper the effect of wafer thinning on the WLTFP is investigated by means of simulation and experiments. The effects of tape removal on WLTFP's are simulated in 2 and 3 dimensions using the cohesive zones technique. Necessary adhesive properties of the grinding foil are measured by a grinding tape peeling experiment. In 2D FE simulation damage is included to predict the most likely cracking path.