Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

Journal article (2009)

Authors

H. Sadeghian Marnani Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
C. Yang Electronic Instrumentation - EEMCS
J.F.L. Goosen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
E Drift External organisation
A. Bossche Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics

Abstract

This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young's Modulus E (~170-70 GPA) of [110] silicon nanocantilevers (thickness ~1019-40nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems behaviors. The E is retrieved from the pull-in voltage of the structure via the electromechanical coupled equation, with a typical error of