A novel bulge-testing set-up for tensile testing of micromachined rectangular free-standing thin films.

Kalkman, AJ; Verbruggen, A.H.; Janssen, G.C.A.M.; Groen, FH

A novel bulge-testing set-up for tensile testing of micromachined rectangular free-standing thin films.

Journal article (1999)

Authors

AJ Kalkman QN/Fysics of NanoElectronics

A.H. Verbruggen QN/Fysics of NanoElectronics

G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties

FH Groen ImPhys/Optics -

Research Group

QN/Fysics of NanoElectronics

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Published Date

1999

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Research Group

QN/Fysics of NanoElectronics