Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications

Journal article (2002)

Authors

E Connolly Electronic Instrumentation - EEMCS
GM O'Halloran External organisation
HTM Pham Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
P.J. French Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2002

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation