Removal of vacancy type clusters by low energy ion generated self-interstitials in crystalline silicon

Journal article (1999)

Authors

AV Fedorov Old - Section Defects in Materials
A van Veen Old - Section Defects in Materials
H. Schut Old - Section Defects in Materials
A Rivera Old - Section Defects in Materials
Research Group
Old - Section Defects in Materials
More Info
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Published Date

1999

Language

Undefined/Unknown

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Research Group

Old - Section Defects in Materials