Enabling efficient multilayer Optimization Based on the extended Nijboer-Zernike (ENZ) Imaging Algorithm.

Conference paper (2010)

Authors

S. van Haver ImPhys/Optics
J.J.M. Braat ImPhys/Optics
Silvania Pereira ImPhys/Optics
Research Group
ImPhys/Optics
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Published Date

2010

Language

Undefined/Unknown

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Research Group

ImPhys/Optics

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