Spin, spray coating and electrodeposition of photoresist for MEMS structures - a comparison

Boellaard, E; Pham, PN; Sarro, Pasqualina M; Burghartz, JN

Spin, spray coating and electrodeposition of photoresist for MEMS structures - a comparison

Conference paper (2002)

Authors

E Boellaard Electronic Components, Technology and Materials -

PN Pham Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2002

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials