The kinetics of tungsten deposition from the H2/WF6 mixture studied by in situ laser Raman scattering

Conference paper (1996)

Authors

TGM Oosterlaken External organisation
GJ Leusink External organisation
G.C.A.M. Janssen OLD Metals Processing, Microstructures and Properties
S Radelaar OLD Metals Processing, Microstructures and Properties
Research Group
OLD Metals Processing, Microstructures and Properties
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Published Date

1996

Language

English

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Research Group

OLD Metals Processing, Microstructures and Properties