Lateral nano-Newton force-sensing piezoresistive cantilever for micro-particels handling

Conference paper (2005)

Authors

T Chu Duc Electronic Components, Technology and Materials - EEMCS
J.F. Creemer QN/High Resolution Electron Microscopy
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2005

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials