Tuning the Q -factor of nanomechanical string resonators by torsion support design

Journal article (2023)

Authors

Z. Li Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
M. Xu Kavli institute of nanoscience Delft, QN/Groeblacher Lab - AS
R.A. Norte Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , QN/Groeblacher Lab - AS , Kavli institute of nanoscience Delft
A.M. Aragon Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
A. van Keulen Mechanical Engineering
F. Alijani Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
P.G. Steeneken Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , QN/Steeneken Lab - AS , Kavli institute of nanoscience Delft
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2023 Z. Li, M. Xu, R.A. Norte, A.M. Aragon, A. van Keulen, F. Alijani, P.G. Steeneken
DOI: https://doi.org/10.1063/5.0133177
More Info
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Published Date

2023

Language

English

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems

Abstract

In recent years, the Q-factor of Si 3 N 4 nanomechanical resonators has significantly been increased by soft-clamping techniques using large and complex support structures. To date, however, obtaining similar performance with smaller supports has remained a challenge. Here, we make use of torsion beam supports to tune the Q-factor of Si 3 N 4 string resonators. By design optimization of the supports, we obtain a 50% Q-factor enhancement compared to the standard clamped-clamped string resonators. By performing experimental and numerical studies, we show that further improvement of the Q-factor is limited by a trade-off between maximizing stress and minimizing torsional support stiffness. Thus, our study also provides insight into dissipation limits of high-stress string resonators and outlines how advanced designs can be realized for reaching ultimate f 0 × Q product while maintaining a small footprint.