Fabrication of a CMOS compatible pressure sensor for harsh environments

Pakula, L.S.; Yang, H; Pham, HTM; French, P.J.; Sarro, Pasqualina M

Fabrication of a CMOS compatible pressure sensor for harsh environments

Journal article (2004)

Authors

L.S. Pakula Electronic Instrumentation -

H Yang Electronic Instrumentation -

HTM Pham Electronic Components, Technology and Materials -

P.J. French Electronic Instrumentation -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Instrumentation () (TU Delft)

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Published Date

2004

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation