The work described in the doctoral thesis aims to enhance the functionality of a scanning electron microscope (SEM) by integrating miniaturized versions of cleanroom tools used in microfabrication. The thesis presents the integration of substrate heating, in-situ thermal atomic layer deposition (ALD), sputtering, and thermal evaporation within the SEM. These techniques are expected to enable fast and efficient fabrication of proof-of-concept devices with minimal resources. The thesis also discusses the challenges, limitations, and future work of the integrated cleanroom processes in SEM.@en

In this thesis, the author investigates the extended Schottky source for the application in a multi-beam source (MBS). The work has been done in both theoretical work and experimental work.@en