The Schottky emitter as a source for multi-electron-beam instruments

Guo, X.

The Schottky emitter as a source for multi-electron-beam instruments

Doctoral thesis (2024)

Authors

X. Guo ImPhys/Hoogenboom group

Contributors

P Kruit ImPhys/Hoogenboom group (promotor)

Jacob Hoogenboom ImPhys/Imaging Physics (promotor)

Research Group

ImPhys/Hoogenboom group

Scanning electron microscope Schottky source Multi-beam instrument

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Published Date

2024

Language

English

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Research Group

ImPhys/Hoogenboom group

Abstract

In this thesis, the author investigates the extended Schottky source for the application in a multi-beam source (MBS). The work has been done in both theoretical work and experimental work.

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