AS

A.S. Sisman

1 records found

This study presents an AlN-based Lamb wave (A0 mode) liquid sensing device designed for biomedical applications. The Lamb wave device features a 1.5 μm composite membrane consisting of a 500 nm LPCVD SiN and a 1 μm of a c-axis oriented AlN film. Additionally, an innovative 45° ro ...