WG

W.A. Gahar

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Authored

This study presents an AlN-based Lamb wave (A0 mode) liquid sensing device designed for biomedical applications. The Lamb wave device features a 1.5 μm composite membrane consisting of a 500 nm LPCVD SiN and a 1 μm of a c-axis oriented AlN film. Additionally, an innovative 45° ro ...