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AG Fitzgerald
Academic Work (1)
Journal article (1)
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X-ray photoelectron spectroscopy studies of the effects of plasma etching on amorphous carbon nitride films
Journal article (2002) -
L Jiang (author)
,
AG Fitzgerald (author)
,
MJ Rose (author)
,
R Cheung (author)
,
B Rong (author)
,
E.W.J.M. van der Drift (author)
